This is to request support, in the amount $5,000, to enable students to attend the 59^th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN), 2015, to be held at the Manchester Grand Hyatt Hotel in San Diego, CA, May 26 to 29, 2015. The EIPBN Conference is recognized as the foremost international meeting dedicated to lithographic science and technology and its application to micro and nanofabrication techniques. The conference brings together engineers and scientists from industries and universities from all over the world to discuss recent progress and future trends. Among the emerging technologies that are within the scope of EIPBN is Nanofabrication for Energy Sources along with nanofabrication for the realization of low power integrated circuits. Every year, EIPBN provides financial support for students to attend the conference. The steering committee and attendees view students as the lifeblood of the conference, in that they both provide a fresh and exciting perspective, and also become the future scientists attending the conference in the future on a regular basis. This support provides for their travel to the conference and usually comes from a mixture of government agencies and private donors.

The EIPBN conference encompasses all of the relevant research and technological advances that impact lithography, nanofabrication, and applications that are enabled by these technologies. To achieve this goal the conference seeks to provide a forum to present original research in the areas of patterning technology: DUV, immersion, EUV and X-ray lithography; electron and ion beam lithography; sub-half wavelength “super resolution” optical lithography; photon- and charged-particle optics; metrology and alignment; resists and resist processing; plasma etching and deposition; nano-fabrication techniques; and maskless lithography. Topics in nanofabrication and emerging technologies include: nanoelectronics; nanomagnetic devices; novel ultrahigh density data storage devices; nanoparticle synthesis and assembly; nanofabrication for energy sources; atomic and molecular manipulation; optical tweezers; simulation and computer aided design for the nanoscale era; nanometer scale photonic devices; molecular and low-dimensional nano-electronics; bio-nanotechnology & hybrid bio/solid state devices; micro and nano-scaled MEMS; nano-particle, synthesis and assembly; self-assembly and directed self-assembly; nanoimprint lithography; embossing and soft lithography.

To accommodate student participation, EIPBN provides student registration for the conference at a substantial discount ($275 instead of $700). However, air transportation to San Diego remains a cost that all students must somehow afford if they are to attend.

We anticipate that about 60 students will qualify for travel aid. The DOE funds received by the conference will provide travel expense support for 12 students traveling from colleges. Most grants to students will be $410 each (depending on their distance from the conference site). Student support will be provided to US as well as overseas students. However, DOE funds will only be distributed to students attending American universities. All students who receive travel aid present papers at the conference and all assist in managing the A/V requirements during technical sessions.

The $5,000 requested from DOE will only be used for student support. The conference is canvassing additional support from NSF, DARPA and industrial sponsors.